Granted Patent
Utility
US 5,693,550 · App. 08/739,889
Method of fabricating self-aligned silicide device using CMP
Inventor:
Kozi Torii
Patented Case
View Patent ↗
Granted: Dec 2, 1997
Filed: Oct 31, 1996
Inventor
Kozi Torii
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.