Granted Patent
Utility
US 5,693,567 · App. 08/483,404
Separately etching insulating layer for contacts within array and for peripheral pads
Inventors:
Richard Weisfield, Nizar S. Kheraj, Mai Nguyen
Patented Case
View Patent ↗
Granted: Dec 2, 1997
Filed: Jun 7, 1995
Inventors
Richard Weisfield
Nizar S. Kheraj
Mai Nguyen
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.