Granted Patent
Utility
US 5,698,071 · App. 08/636,143
High speed ashing method
Inventor:
Hideaki Kawamoto
Patented Case
View Patent ↗
Granted: Dec 16, 1997
Filed: Apr 22, 1996
Inventor
Hideaki Kawamoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.