Granted Patent
Utility
US 5,698,376 · App. 08/618,873
Method of producing a resist pattern by contact imaging a photoimageable composition providing a tack-free surface
Inventors:
James J. Briguglio, Charles R. Keil, Vinai Ming Tara, Edward J. Reardon, Randall W. Kautz
Patented Case
View Patent ↗
Granted: Dec 16, 1997
Filed: Mar 20, 1996
Inventors
James J. Briguglio
Charles R. Keil
Vinai Ming Tara
Edward J. Reardon
Randall W. Kautz
Assignee (at issue)
Morton International, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.