Granted Patent
Utility
US 5,701,014 · App. 08/673,705
Projection lithography apparatus
Inventors:
Steven Berger, James A. Liddle, George Patrick Watson
Patented Case
View Patent ↗
Granted: Dec 23, 1997
Filed: Jun 25, 1996
Inventors
Steven Berger
James A. Liddle
George Patrick Watson
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.