IP Library Granted Patent US 5,701,192
Granted Patent Utility
US 5,701,192 · App. 08/639,581

Thin film actuated mirror array and method of manufacturing the same

Inventors: Jeong-Beom Ji, Yong-Ki Min
Patented Case View Patent ↗
Granted: Dec 23, 1997 Filed: Apr 29, 1996
Inventors
Jeong-Beom Ji
Yong-Ki Min
Assignee (at issue)
Daewoo Electronics Corporation

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Quick Facts
Patent No.
US 5,701,192
App. No.
08/639,581
Filed
1996-04-29
Granted
1997-12-23
Kind
A