IP Library › Granted Patent US 5,701,627
Granted Patent Utility
US 5,701,627 · App. 08/720,317

Substrate processing apparatus

Inventors: Yoshio Matsumura, Katsumi Shimaji
Patented Case View Patent ↗
Granted: Dec 30, 1997 Filed: Sep 27, 1996
Inventors
Yoshio Matsumura
Katsumi Shimaji
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 5,701,627
App. No.
08/720,317
Filed
1996-09-27
Granted
1997-12-30
Kind
A