Granted Patent
Utility
US 5,702,292 · App. 08/741,818
Apparatus and method for loading and unloading substrates to a chemical-mechanical planarization machine
Inventors:
Thad Brunelli, Gina Garrison, Wade Van Buren
Patented Case
View Patent ↗
Granted: Dec 30, 1997
Filed: Oct 31, 1996
Inventors
Thad Brunelli
Gina Garrison
Wade Van Buren
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.