Granted Patent
Utility
US 5,705,403 · App. 08/696,092
Method of measuring doping characteristic of compound semiconductor in real time
Inventors:
Jong-Hyeob Baek, Bun Lee, Jin Hong Lee, Sung Woo Choi
Patented Case
View Patent ↗
Granted: Jan 6, 1998
Filed: Aug 13, 1996
Inventors
Jong-Hyeob Baek
Bun Lee
Jin Hong Lee
Sung Woo Choi
Assignee (at issue)
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.