Granted Patent
Utility
US 5,706,565 · App. 08/707,107
Method for making an all-silicon capacitive pressure sensor
Inventors:
Douglas Ray Sparks, William J. Baney, Steven E. Staller, Dan W. Chilcott, James Siekkinen
Patented Case
View Patent ↗
Granted: Jan 13, 1998
Filed: Sep 3, 1996
Inventors
Douglas Ray Sparks
William J. Baney
Steven E. Staller
Dan W. Chilcott
James Siekkinen
Assignee (at issue)
DELCO ELECTRONICS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.