IP Library Granted Patent US 5,714,009
Granted Patent Utility
US 5,714,009 · App. 08/371,195

Apparatus for generating large distributed plasmas by means of plasma-guided microwave power

Inventor: Norman L. Boling
Patented Case View Patent ↗
Granted: Feb 3, 1998 Filed: Jan 11, 1995
Inventor
Norman L. Boling
Assignee (at issue)
Deposition Sciences, Inc.

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Quick Facts
Patent No.
US 5,714,009
App. No.
08/371,195
Filed
1995-01-11
Granted
1998-02-03
Kind
A