Granted Patent
Utility
US 5,721,164 · App. 08/747,503
Method of manufacturing thin film transistors
Inventor:
Biing-Seng Wu
Patented Case
View Patent ↗
Granted: Feb 24, 1998
Filed: Nov 12, 1996
Inventor
Biing-Seng Wu
Assignee (at issue)
Industrial Technology Research Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.