Granted Patent
Utility
US 5,721,176 · App. 07/891,484
Use of oxalyl chloride to form chloride-doped silicon dioxide films of silicon substrates
Inventors:
Michael J. McGeary, Herman J. Boeglin
Patented Case
View Patent ↗
Granted: Feb 24, 1998
Filed: May 29, 1992
Inventors
Michael J. McGeary
Herman J. Boeglin
Assignee (at issue)
Olin Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.