Granted Patent
Utility
US 5,725,739 · App. 08/677,659
Low angle, low energy physical vapor deposition of alloys
Inventor:
Yongjun Jeff Hu
Patented Case
View Patent ↗
Granted: Mar 10, 1998
Filed: Jul 8, 1996
Inventor
Yongjun Jeff Hu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.