Granted Patent
Utility
US 5,728,279 · App. 08/356,109
Cobalt base alloy target for a magnetron cathode sputtering system
Inventors:
Martin Schlott, Martin Weigert, Kwei Teng, Bruce Gehman
Patented Case
View Patent ↗
Granted: Mar 17, 1998
Filed: Dec 15, 1994
Inventors
Martin Schlott
Martin Weigert
Kwei Teng
Bruce Gehman
Assignee (at issue)
Leybold Materials GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.