Granted Patent
Utility
US 5,728,595 · App. 08/605,496
Method of fabricating a self-aligned contact hole for a semiconductor device
Inventor:
Tadashi Fukase
Patented Case
View Patent ↗
Granted: Mar 17, 1998
Filed: Feb 26, 1996
Inventor
Tadashi Fukase
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.