Granted Patent
Utility
US 5,730,835 · App. 08/594,842
Facet etch for improved step coverage of integrated circuit contacts
Inventors:
Ceredig Roberts, Anand Srinivasan, Gurtej S. Sandhu, Sujit Sharan
Patented Case
View Patent ↗
Granted: Mar 24, 1998
Filed: Jan 31, 1996
Inventors
Ceredig Roberts
Anand Srinivasan
Gurtej S. Sandhu
Sujit Sharan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.