Granted Patent
Utility
US 5,733,706 · App. 08/737,989
Dry-developable positive resist
Inventors:
Recai Sezi, Rainer Leuschner, Horst Borndorfer, Eva Rissel, Michael Sebald, Hellmut Ahne, Siegfried Birkle, Eberhard Kuhn
Patented Case
View Patent ↗
Granted: Mar 31, 1998
Filed: Nov 25, 1996
Inventors
Recai Sezi
Rainer Leuschner
Horst Borndorfer
Eva Rissel
Michael Sebald
Hellmut Ahne
Siegfried Birkle
Eberhard Kuhn
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.