IP Library Granted Patent US 5,735,963
Granted Patent Utility
US 5,735,963 · App. 08/767,758

Method of polishing

Inventor: Yaw S. Obeng
Patented Case View Patent ↗
Granted: Apr 7, 1998 Filed: Dec 17, 1996
Inventor
Yaw S. Obeng
Assignee (at issue)
LUCENT TECHNOLOGIES INC.

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Quick Facts
Patent No.
US 5,735,963
App. No.
08/767,758
Filed
1996-12-17
Granted
1998-04-07
Kind
A