Granted Patent
Utility
US 5,736,002 · App. 08/293,821
Methods and equipment for anisotropic, patterned conversion of copper into selectively removable compounds and for removal of same
Inventors:
Lynn R. Allen, John M. Grant
Patented Case
View Patent ↗
Granted: Apr 7, 1998
Filed: Aug 22, 1994
Inventors
Lynn R. Allen
John M. Grant
Assignees (at issue)
Sharp Microelectronics Technology Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.