Granted Patent
Utility
US 5,741,547 · App. 08/589,924
Method for depositing a film of titanium nitride
Inventors:
Salman Akram, Daniel A. Koos
Patented Case
View Patent ↗
Granted: Apr 21, 1998
Filed: Jan 23, 1996
Inventors
Salman Akram
Daniel A. Koos
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.