Granted Patent
Utility
US 5,742,395 · App. 08/425,827
Method for checking semiconductor wafers and apparatuses for carrying out the method
Inventors:
Ernst Biedermann, Matthias Grieshop, Manfred Ben El Mekki, Kenneth Weisheit, Thomas Griebsch, Gerhard Ross
Patented Case
View Patent ↗
Granted: Apr 21, 1998
Filed: Apr 20, 1995
Inventors
Ernst Biedermann
Matthias Grieshop
Manfred Ben El Mekki
Kenneth Weisheit
Thomas Griebsch
Gerhard Ross
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.