Granted Patent
Utility
US 5,744,192 · App. 08/745,562
Method of using water vapor to increase the conductivity of cooper desposited with cu(hfac)TMVS
Inventors:
Tue Nguyen, Yoshihide Senzaki, Masato Kobayashi, Lawrence J. Charneski, Sheng Teng Hsu
Patented Case
View Patent ↗
Granted: Apr 28, 1998
Filed: Nov 8, 1996
Inventors
Tue Nguyen
Yoshihide Senzaki
Masato Kobayashi
Lawrence J. Charneski
Sheng Teng Hsu
Assignees (at issue)
Sharp Microelectronics Technology Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.