Granted Patent
Utility
US 5,744,401 · App. 08/620,195
Silicon wafer manufacturing method eliminating final mirror-polishing step
Inventors:
Hiroshi Shirai, Jun Yoshikawa, Youji Ogawa, Kazuhiko Kashima, Kazuya OOKUBO, Yukari Kohtari, Norihiro Shimoi, Masayuki Sanada, Shuji Tobashi
Patented Case
View Patent ↗
Granted: Apr 28, 1998
Filed: Mar 22, 1996
Inventors
Hiroshi Shirai
Jun Yoshikawa
Youji Ogawa
Kazuhiko Kashima
Kazuya OOKUBO
Yukari Kohtari
Norihiro Shimoi
Masayuki Sanada
Shuji Tobashi
Assignee (at issue)
Toshiba Ceramics Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.