Granted Patent
Utility
US 5,744,403 · App. 07/719,699
Dielectric film deposition method and apparatus
Inventors:
Edward Dein, Michael Gross, Richard Pudliner, Jr.
Patented Case
View Patent ↗
Granted: Apr 28, 1998
Filed: Jun 25, 1991
Inventors
Edward Dein
Michael Gross
Richard Pudliner, Jr.
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.