IP Library Granted Patent US 5,747,802
Granted Patent Utility
US 5,747,802 · App. 08/626,192

Automated non-visual method of locating periodically arranged sub-micron objects

Inventors: Norbert Arnold, Klaus Hummler, Ernest N. Levine, Rainer Weiland
Patented Case View Patent ↗
Granted: May 5, 1998 Filed: Mar 29, 1996
Inventors
Norbert Arnold
Klaus Hummler
Ernest N. Levine
Rainer Weiland
Assignees (at issue)
Siemens Aktiengesellschaft
International Business Machines Corporation

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Quick Facts
Patent No.
US 5,747,802
App. No.
08/626,192
Filed
1996-03-29
Granted
1998-05-05
Kind
A