Granted Patent
Utility
US 5,748,436 · App. 08/785,082
Ceramic electrostatic chuck and method
Inventors:
Junich Honma, Kotaro Mino, Hisayuki Miyata, Haruhide Inoue
Patented Case
View Patent ↗
Granted: May 5, 1998
Filed: Jan 21, 1997
Inventors
Junich Honma
Kotaro Mino
Hisayuki Miyata
Haruhide Inoue
Assignee (at issue)
ADVANCED CERAMIC X CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.