Granted Patent
Utility
US 5,748,656 · App. 08/583,302
Laser having improved beam quality and reduced operating cost
Inventors:
Tom A. Watson, William N. Partlo, Donald G. Larson, Igor V. Fomenkov, Anthony John de Ruyter, Palash P. Das
Patented Case
View Patent ↗
Granted: May 5, 1998
Filed: Jan 5, 1996
Inventors
Tom A. Watson
William N. Partlo
Donald G. Larson
Igor V. Fomenkov
Anthony John de Ruyter
Palash P. Das
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.