Granted Patent
Utility
US 5,751,607 · App. 08/621,507
Method of sputter deposition simulation by inverse trajectory calculation
Inventor:
Toshiyuki Ohta
Patented Case
View Patent ↗
Granted: May 12, 1998
Filed: Mar 25, 1996
Inventor
Toshiyuki Ohta
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.