IP Library Granted Patent US 5,753,045
Granted Patent Utility
US 5,753,045 · App. 08/499,989

Vacuum treatment system for homogeneous workpiece processing

Inventors: Johann Karner, Mauro Pedrazzini, Erich Bergmann
Patented Case View Patent ↗
Granted: May 19, 1998 Filed: Jul 10, 1995
Inventors
Johann Karner
Mauro Pedrazzini
Erich Bergmann
Assignee (at issue)
Balzers Aktiengesellschaft

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Quick Facts
Patent No.
US 5,753,045
App. No.
08/499,989
Filed
1995-07-10
Granted
1998-05-19
Kind
A