Granted Patent
Utility
US 5,753,089 · App. 08/673,155
Sputter coating station
Inventor:
Walter Haag
Patented Case
View Patent ↗
Granted: May 19, 1998
Filed: Jun 25, 1996
Inventor
Walter Haag
Assignee (at issue)
Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.