IP Library Granted Patent US 5,753,406
Granted Patent Utility
US 5,753,406 · App. 08/018,221

Radiation-sensitive resin composition

Inventors: Satoshi Miyashita, Akihiro Yamanouchi, Ikuo Nozue, Takao Miura
Patented Case View Patent ↗
Granted: May 19, 1998 Filed: Feb 16, 1993
Inventors
Satoshi Miyashita
Akihiro Yamanouchi
Ikuo Nozue
Takao Miura
Assignee (at issue)
Japan Synthetic Rubber Corporation

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Quick Facts
Patent No.
US 5,753,406
App. No.
08/018,221
Filed
1993-02-16
Granted
1998-05-19
Kind
A