Granted Patent
Utility
US 5,753,533 · App. 08/663,599
Method for etching a tungsten film
Inventor:
Kazumi Saito
Patented Case
View Patent ↗
Granted: May 19, 1998
Filed: Jun 14, 1996
Inventor
Kazumi Saito
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.