Granted Patent
Utility
US 5,753,567 · App. 08/519,993
Cleaning of metallic contaminants from the surface of polycrystalline silicon with a halogen gas or plasma
Inventors:
Mohsen Banan, Richard L. Hansen
Patented Case
View Patent ↗
Granted: May 19, 1998
Filed: Aug 28, 1995
Inventors
Mohsen Banan
Richard L. Hansen
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.