Granted Patent
Utility
US 5,759,740 · App. 08/748,298
High resolution i-line photoresist of high sensitivity
Inventors:
Norbert Munzel, Reinhard Schulz, Heinz Holzwarth, Stephan Ilg
Patented Case
View Patent ↗
Granted: Jun 2, 1998
Filed: Nov 13, 1996
Inventors
Norbert Munzel
Reinhard Schulz
Heinz Holzwarth
Stephan Ilg
Assignee (at issue)
Ciba Specialty Chemicals Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.