Granted Patent
Utility
US 5,759,971 · App. 08/509,222
Semiconductor wafer cleaning liquid
Inventor:
Kazuyoshi Manako
Patented Case
View Patent ↗
Granted: Jun 2, 1998
Filed: Jul 31, 1995
Inventor
Kazuyoshi Manako
Assignee (at issue)
Sumitomo Sitix Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.