Granted Patent
Utility
US 5,762,086 · App. 08/575,021
Apparatus for delivering process gas for making semiconductors and method of using same
Inventor:
Louis A. Ollivier
Patented Case
View Patent ↗
Granted: Jun 9, 1998
Filed: Dec 19, 1995
Inventor
Louis A. Ollivier
Assignee (at issue)
Veriflo Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.