IP Library Granted Patent US 5,762,749
Granted Patent Utility
US 5,762,749 · App. 08/677,924

Apparatus for removing liquid from substrates

Inventors: Satoshi Suzuki, Mitsuaki Yoshitani, Yoshio Matsumura, Yasuhiro Akita, Hiroshi Yamamoto
Patented Case View Patent ↗
Granted: Jun 9, 1998 Filed: Jul 10, 1996
Inventors
Satoshi Suzuki
Mitsuaki Yoshitani
Yoshio Matsumura
Yasuhiro Akita
Hiroshi Yamamoto
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 5,762,749
App. No.
08/677,924
Filed
1996-07-10
Granted
1998-06-09
Kind
A