Granted Patent
Utility
US 5,763,142 · App. 08/807,180
Method for forming resist pattern
Inventor:
Shigeyuki Iwasa
Patented Case
View Patent ↗
Granted: Jun 9, 1998
Filed: Feb 27, 1997
Inventor
Shigeyuki Iwasa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.