Granted Patent
Utility
US 5,763,300 · App. 08/709,249
Method of fabricating microelectronic capacitors having tantalum pentoxide dielectrics and oxygen barriers
Inventors:
In Sung Park, Kyung-Hoon Kim
Patented Case
View Patent ↗
Granted: Jun 9, 1998
Filed: Sep 10, 1996
Inventors
In Sung Park
Kyung-Hoon Kim
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.