Granted Patent
Utility
US 5,765,072 · App. 08/803,618
Treating solution supplying method and substrate treating apparatus
Inventors:
Masami Ohtani, Yoshiteru Fukutomi
Patented Case
View Patent ↗
Granted: Jun 9, 1998
Filed: Feb 21, 1997
Inventors
Masami Ohtani
Yoshiteru Fukutomi
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.