Granted Patent
Utility
US 5,765,890 · App. 08/724,908
Device for transferring a semiconductor wafer
Inventors:
Eric Lee Gaylord, James S. Taylor
Patented Case
View Patent ↗
Granted: Jun 16, 1998
Filed: Oct 3, 1996
Inventors
Eric Lee Gaylord
James S. Taylor
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.