Granted Patent
Utility
US 5,766,426 · App. 08/388,475
Apparatus for, and method of, depositing a film on a substrate
Inventor:
Andrew Clarke
Patented Case
View Patent ↗
Granted: Jun 16, 1998
Filed: Feb 14, 1995
Inventor
Andrew Clarke
Assignee (at issue)
Sputtered Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.