Granted Patent
Utility
US 5,769,689 · App. 08/608,287
Compositions and methods for polishing silica, silicates, and silicon nitride
Inventors:
David Cossaboon, Jiun-Fang Wang, Lee Melbourne Cook
Patented Case
View Patent ↗
Granted: Jun 23, 1998
Filed: Feb 28, 1996
Inventors
David Cossaboon
Jiun-Fang Wang
Lee Melbourne Cook
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.