IP Library › Granted Patent US 5,770,465
Granted Patent Utility
US 5,770,465 · App. 08/668,378

Trench-filling etch-masking microfabrication technique

Inventors: Noel C. MacDonald, Xiaojun Huang, Liang-Yuh Chen
Patented Case View Patent ↗
Granted: Jun 23, 1998 Filed: Jun 21, 1996
Inventors
Noel C. MacDonald
Xiaojun Huang
Liang-Yuh Chen
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 5,770,465
App. No.
08/668,378
Filed
1996-06-21
Granted
1998-06-23
Kind
A