Granted Patent
Utility
US 5,771,098 · App. 08/721,460
Laser interferometric lithographic system providing automatic change of fringe spacing
Inventors:
Amalkumar P. Ghosh, Susan K. Schwartz Jones, Gary W. Jones, Steven M. Zimmerman, Yachin Liu
Patented Case
View Patent ↗
Granted: Jun 23, 1998
Filed: Sep 27, 1996
Inventors
Amalkumar P. Ghosh
Susan K. Schwartz Jones
Gary W. Jones
Steven M. Zimmerman
Yachin Liu
Assignee (at issue)
FED Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.