Granted Patent
Utility
US 5,771,258 · App. 08/857,608
Aerodynamic chamber design for high pulse repetition rate excimer lasers
Inventors:
Richard G. Morton, Igor V. Fomenkov, William N. Partlo
Patented Case
View Patent ↗
Granted: Jun 23, 1998
Filed: May 16, 1997
Inventors
Richard G. Morton
Igor V. Fomenkov
William N. Partlo
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.