Granted Patent
Utility
US 5,772,386 · App. 08/615,386
Loading and unloading station for semiconductor processing installations
Inventors:
Andreas Mages, Werner Scheler, Herbert Blaschitz, Alfred Schulz, Heinz Schneider
Patented Case
View Patent ↗
Granted: Jun 30, 1998
Filed: Mar 14, 1996
Inventors
Andreas Mages
Werner Scheler
Herbert Blaschitz
Alfred Schulz
Heinz Schneider
Assignee (at issue)
JENOPTIK GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.