Granted Patent
Utility
US 5,772,860 · App. 08/308,234
High purity titanium sputtering targets
Inventors:
Susumu Sawada, Hideaki Fukuyo, Masaru Nagasawa
Patented Case
View Patent ↗
Granted: Jun 30, 1998
Filed: Sep 19, 1994
Inventors
Susumu Sawada
Hideaki Fukuyo
Masaru Nagasawa
Assignee (at issue)
Japan Energy Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.