Granted Patent
Utility
US 5,773,152 · App. 08/543,068
SOI substrate having a high heavy metal gettering effect for semiconductor device
Inventor:
Kensuke Okonogi
Patented Case
View Patent ↗
Granted: Jun 30, 1998
Filed: Oct 13, 1995
Inventor
Kensuke Okonogi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.